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METHOD FOR PRODUCING SAPPHIRE SINGLE CRYSTAL, SAPPHIRE SUBSTRATE, AND SEMICONDUCTOR LIGHT EMITTING ELEMENT

机译:制备蓝宝石单晶,蓝宝石基质和半导体发光元件的方法

摘要

PROBLEM TO BE SOLVED: To provide a sapphire single crystal ingot having a small strain, to provide a sapphire substrate, and to provide a high quality semiconductor light emitting element that is obtained by forming a compound semiconductor layer on a sapphire substrate.;SOLUTION: Aluminum oxide and an additive that contains the oxide of an additional element composed of at least one element selected from among silicon, germanium and tin are introduced into a crucible 15, while setting the weight concentration of the additive within the range of 30-500 ppm relative to the aluminum oxide, and after obtaining an alumina melt 35 by melting the aluminum oxide and the additive in the crucible 15, a sapphire ingot 30 that contains the aluminum oxide and the additive and has a sapphire single crystal structure is pulled up from the alumina melt 35 in the crucible 15. The thus-pulled up sapphire ingot 30 has a weight concentration of the additional element of 2-80 ppm relative to the aluminum oxide.;COPYRIGHT: (C)2012,JPO&INPIT
机译:解决的问题:提供应变小的蓝宝石单晶锭,提供蓝宝石衬底,以及提供通过在蓝宝石衬底上形成化合物半导体层而获得的高质量半导体发光元件。将氧化铝和包含由选自硅,锗和锡中的至少一种元素组成的附加元素的氧化物的添加剂引入坩埚15,同时将添加剂的重量浓度设置在30-500 ppm的范围内相对于氧化铝,并且通过在坩埚15中熔融氧化铝和添加剂获得氧化铝熔体35之后,将包含氧化铝和添加剂并且具有蓝宝石单晶结构的蓝宝石锭料30从硅锭上拉。坩埚15中的氧化铝熔体35。这样拉出的蓝宝石锭30相对于铝具有2-80ppm的重量百分比的附加元素。氧化物;(C)2012,JPO&INPIT

著录项

  • 公开/公告号JP2012012242A

    专利类型

  • 公开/公告日2012-01-19

    原文格式PDF

  • 申请/专利权人 SHOWA DENKO KK;

    申请/专利号JP20100149084

  • 发明设计人 FUKUDA TSUGUO;SHONAI TOMOHIRO;

    申请日2010-06-30

  • 分类号C30B29/20;C30B15/04;C30B33/02;H01L33/32;

  • 国家 JP

  • 入库时间 2022-08-21 17:43:15

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