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Method and apparatus for characterizing nanomaterials with energy storage electrode structure

机译:表征具有储能电极结构的纳米材料的方法和装置

摘要

Embodiments described herein generally relate to methods and apparatus for forming an electrode structure used in an energy storage device. More particularly, embodiments described herein relate to methods and apparatus for characterizing nanomaterials used in forming high capacity electrode structures for energy storage devices. In one embodiment a process for forming an electrode structure for an energy storage device is provided. The process comprises depositing a columnar metal structure over a substrate at a first current density by a diffusion limited deposition process, measuring a capacitance of the columnar metal structure to determine a surface area of the columnar metal structure, and depositing three dimensional porous metal structures over the columnar metal structure at a second current density greater than the first current density.
机译:本文描述的实施例总体上涉及用于形成在能量存储装置中使用的电极结构的方法和设备。更具体地,本文描述的实施例涉及用于表征用于形成用于能量存储装置的高容量电极结构的纳米材料的方法和装置。在一个实施例中,提供了一种用于形成用于能量存储装置的电极结构的方法。该工艺包括:通过扩散受限沉积工艺以第一电流密度在基板上沉积柱状金属结构;测量柱状金属结构的电容以确定柱状金属结构的表面积;以及在其上沉积三维多孔金属结构。在大于第一电流密度的第二电流密度下的柱状金属结构。

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