METROLOGY METHODS AND APPARATUS FOR NANOMATERIAL CHARACTERIZATION OF ENERGY STORAGE ELECTRODE STRUCTURES

摘要

The embodiments described herein relate generally to a method and apparatus for forming an electrode structure for use in an energy storage device. More specifically, the embodiments described herein relate to a method and apparatus for characterizing nanomaterials used to form high capacity electrode structures for energy storage devices. In one embodiment, a process for forming an electrode structure for an energy storage device is provided. The process includes the steps of depositing a columnar metal structure on a substrate at a first current density by a diffusion limited deposition process, measuring the capacitance of the columnar metal structure to determine the surface area of the columnar metal structure, And depositing three-dimensional porous metal structures on the columnar metal structure at a second current density that is greater than a current density of the first current density.