INSPECTION DEVICE FOR PATTERNED MEDIA AND INSPECTION METHOD FOR STAMPER FOR PATTERNED MEDIA

摘要

PROBLEM TO BE SOLVED: To preliminarily prevent the occurrence of a large amount of failures by specifying a stamper which is the factor of defect occurrence in an early stage by extracting a defect originated in the stamper from the defect of a pattern generated on the disk.;SOLUTION: A pattern formed on the resist film of a substrate is irradiated with illuminating rays of light by nano-inprint by using a stamper, and reflected rays of light from the area of the substrate which has been irradiated with the illuminating rays of light are dispersed and detected, and the dispersed and detected spectral reflectivity waveform data are compared with preliminarily stored reference data to extract an area where any abnormality has occurred in the pattern of the resist film formed on the substrate, and the information of the extracted area where the abnormality has occurred is compared with the inspection data of a plurality of substrates nano-inprinted by using the same stamper inspected just before the inspection of the substrate, and when the abnormality is also detected on the plurality of substrates inspected just before in the same area as the area where the abnormality has occurred, it is determined that this stamper is defective.;COPYRIGHT: (C)2012,JPO&INPIT