In the thermometry device which is provided in the thermometry device and

摘要

PROBLEM TO BE SOLVED: To provide a temperature measuring apparatus for performing a cheap temperature measurement with a high accuracy, and a placement table structure and a thermal processing apparatus using the temperature measuring apparatus.;SOLUTION: In the temperature measuring apparatus provided in a placement table 32 installing a workpiece W to which a predetermined thermal processing is carried out, in the placement table 32 there are provided: a probe body 54 whose upper limit portion is exposed to a front surface, while being embedded along a thickness direction of the placement table 32; temperature control means 56 for carrying out a heating and/or a cooling of a lower limit portion of the probe body 54; a first temperature sensor 58 measuring a temperature of an upper limit portion of the probe body 54; a second temperature sensor 60 measuring a temperature of the lower limit portion of the probe body 54; a temperature difference detecting section 62 searching for a temperature difference between measured values of the first temperature sensor 58 and the second temperature sensor 60; and a temperature measurement control section 64 searching for a temperature of the workpiece W by controlling the temperature control means 56 so that the temperature difference may become zero based on the temperature difference output from the temperature difference detecting section 62.;COPYRIGHT: (C)2009,JPO&INPIT