In the thermometry tool which thermometry tool for the semiconductor production device, is locked by the thermometry manner of the semiconductor

摘要

PROBLEM TO BE SOLVED: To provide a temperature measuring tool which can convey a semiconductor wafer by an automatic conveyer in the same manner as an ordinary semiconductor wafer and can easily and precisely measure temperature during processing of a semiconductor wafer, to provide a method of measuring temperature for a semiconductor manufacturing apparatus using the temperature measuring tool, and to provide a semiconductor manufacturing apparatus which measures temperature by using the temperature measuring tool.;SOLUTION: The temperature measuring tool 10 is comprised of a substrate 11 made of a silicon wafer; a thermocouple 12 which is formed by using film formation method, photo lithograph method, and etching method; and a clamp pad (electrode pad) 13 which is arranged at the edge of the substrate 11, and is connected with the thermocouple 12. In the semiconductor manufacturing apparatus, its clamper pin (fixing jig) is brought into contact with the clamp pad 13, and the temperature measuring tool 10 is fixed to a wafer mounting part. The output of the thermocouple 12 is taken out to the outside through the clamper pin.;COPYRIGHT: (C)2008,JPO&INPIT