MAGNETRON DEVICE, AND PULSE OPERATION METHOD OF MAGNETRON DEVICE

摘要

PROBLEM TO BE SOLVED: To change a flow density of particles colliding with a substrate regardless of a kind of a substrate by realizing means for adjusting a strength of an impact when high energy particles collide with a growth layer at technically low costs in a substrate coat using a magnetron device operating at pulse energy.SOLUTION: A magnetron device has a switch 16 for repeatedly switching an additional electrode 15 so that at least one additional electrode 15 temporarily becomes an anode. When the additional electrode 15 is switched to the anode by the switch 16, magnetron discharging occurs between a target 13 switched to function as a cathode among a target 12 and the target 13, and the additional electrode 15.