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Barometric pressure sensor, hard disk drive equipped with the same, manufacturing method of barometric pressure sensor, and barometric pressure measurement method
Barometric pressure sensor, hard disk drive equipped with the same, manufacturing method of barometric pressure sensor, and barometric pressure measurement method
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机译:气压传感器,配备有该气压传感器的硬盘驱动器,气压传感器的制造方法和气压测量方法
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摘要
An air pressure sensor capable of measuring air pressure highly accurately with a simple configuration is provided. The sensor includes: a sealed case with a sealed space formed therein; a first thin plate member which constitutes at least a part of the wall of the sealed case and deforms to allow the capacity of the sealed space to vary corresponding to changes in the outside air pressure; a first PZT which contacts the first thin plate member to thereby detect the natural frequency thereof; and a second thin plate member which has the same vibration characteristics as those of the first thin plate member and is provided outside the sealed case while contacting it; and a second PZT which has the same temperature characteristics as those of the first PZT and contacts the second thin plate member to thereby detect the natural frequency thereof.
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