MANUFACTURING METHOD FOR MINUTE MOVABLE STRUCTURE, AND MINUTE MOVABLE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To form a contact electrode in a movable electrode structure in a stable state.;SOLUTION: A manufacturing method for a minute movable structure includes the following configuration. A contact forming region above a second electrode 103 is formed with the following contact. In the contact forming region, an adhesion film 105 having a second opening 105a is formed on a sacrificial film 104, and subsequently, the second opening 105a is covered so as to form a contact electrode film 106 on the adhesion film 105. The adhesion film 105 can be composed of, for example, transition metals such as titanium, chromium, zirconium, and tantalum, and their oxides. The contact electrode film 106 can be composed of, for example, platinum-group metals such as ruthenium, rhodium, palladium, osmium, iridium and platinum, and gold or the like.;COPYRIGHT: (C)2012,JPO&INPIT