DIAGNOSTIC SYSTEM OF DAC AMPLIFIER, CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND DIAGNOSTIC METHOD OF DAC AMPLIFIER

摘要

PROBLEM TO BE SOLVED: To diagnose a DAC amplifier reliably even when the speed of the DAC amplifier which deflects a charged particle beam is increased.;SOLUTION: A charged particle beam is passed between electrodes 14a, 14b arranged to face each other, and deflected by the voltage difference between the electrodes 14a, 14b. When it is diagnosed whether DAC amplifiers 20, 21 are normal or not, digital voltage information input to the DC amplifier 20 and the output voltage from the DC amplifier 21 are matched. The DAC amplifiers 20, 21 are diagnosed by detecting shift of the charged particle beam irradiation position when application of the same voltage to the electrodes 14a, 14b is instructed.;COPYRIGHT: (C)2012,JPO&INPIT