With the equipment which possesses the vacuum chamber with the equipment which possesses

摘要

A slider bearing for use with a device having a vacuum chamber, and a base plate in contact with the vacuum chamber at one side, the present invention includes a base plate having a first through hole in contact with the vacuum chamber, surface has a second plate which is in contact on one side and the base plate and a second plate having a second through hole, facing each other of the plate and the second of the base plate is sufficiently smooth, the vacuum seal of the non-elastomer is formed, the base plate and is slidable between the second relative position and the relative position of the first plate and the second, the first The relative position, the second through hole and the through hole of the first, do not overlap, the relative position of the second through hole and the second through hole of the first, overlaps is a flexible plate, the surface opposite to the sealing cap is provided with the base plate of the flexible plate, said cap plate, wherein the second equipped to hold a sample is, curvature, which is controlled, and has edges facing said flexible plate and the curvature of the rim, through the first hole of the base plate, the flexible and the base plate the contour given between the plates, the vacuum seal is formed, Hertzian contact pressure, is formed to be smaller than the maximum predetermined contact pressure, the maximum contact pressure and the predetermined so as to minimize particle generation on a slider bearing is characterized in that it is selected.