Depth resolution the sample, depth resolution the device and the mannered null sample in order

摘要

During the predetermined measurement time, illuminates a pattern whose phase changes with time during the measurement time, one sample area of ​​the sample, thereby illuminating for generating sample light phase time-varying correspondingly is added Evaluation two channels capable of binding (12) (8), the recording pixel spatially resolved detection area has module (1), recording a plurality of pixels (12), records the sample region (13, 14), Detection module comprising (25) an evaluation unit coupled to the (13, 14) evaluating both channels (4), during the measurement time, synchronized in time with the phase of the sample light detected, and each recording pixel Te, is bound alternately (13, 14) evaluating both channels, thereby, is divided into two components out of phase with each other, the sample light is detected, and supplying the control unit to evaluate both channels It includes, in which, based on the components that are supplied to the evaluation channel, a device for detecting optically the evaluation unit calculates the optical section image of the sample area, the decomposition depth sample is provided that.