METHOD FOR DETECTING INTERNAL STRESS OF SAMPLE WITH HIGH TRANSVERSE RESOLUTION, METHOD FOR DETECTING INTERNAL FILM STRESS OF SAMPLE WITH HIGH TRANSVERSE RESOLUTION, AND METHOD FOR DETECTING INTERNAL FILM STRESS OF ANISOTROPIC SAMPLE WITH HIGH TRANSVERSE RESOLUTION

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for evaluating with high transverse resolution an internal film stress for all the samples including nonbendable or solid samples. ;SOLUTION: A calibration curve to corelate setting for the first ellipsometric amplitude with setting for the first strain value is prepared, and the second ellipsometric parameter is measured over a range of a rotation angle α in a selected region of a sample 620 by rotating the sample 620 to detect the second ellipsometric amplitude. The second ellipsometric amplitude is used as an index for detecting the corresponding first strain value from the calibration curve to detect an internal stress in the selected region of the sample 620 based on the calibration curve.;COPYRIGHT: (C)1999,JPO