Being semiconductor classification of defects method of the semiconductor classification of defects device which classifies the defect which is detected semiconductor classification of defects method, by the defective survey instrument which detects the program

摘要

PPROBLEM TO BE SOLVED: To separate systematic defects from detected defects. PSOLUTION: A defect classification defining section 221 defines a region that classifies defects on a surface of the inspected device, by using layout design data corresponding to a layer formed on the inspected device and a layer formed in an upper layer or lower layer thereof. A defect classification processing section 222 classifies the defects, by what a position of the defect is included in which region of the defined regions with regard to defect data 133 (233) sampled from the defects obtained at a defect-reviewing device 10. A defect-counting section 223 counts the classified defects to find the defect densities of each region; and if the defect density of an region is larger than the average value of the defect densities of the other regions, exceeding by a significant difference, a systematic defect determining section 224 determines the defect in the region as being a systematic defect. PCOPYRIGHT: (C)2009,JPO&INPIT