The new silicon precusor in order to produce the ultralow K membrane which possesses high mechanical qualities with the plasma promotion chemical evaporation

摘要

Low the method of making the permittivity membrane accumulate on the baseplate is offered. The permittivity membrane is made to accumulate low with the process which includes the fact that the pore is formed in the membrane with 1 kinds or the plural organosilicic compounds and reacting the polo gene and after processing the membrane next. As 1 kinds or plural organosilicic compounds, general structure Si C _{x Si} or Si O (CH₂) you can list the chemical compound which possesses _{n O Si} . You can list the membrane which includes Si C _{x Si} connection in both before and after the after-treatment of the membrane as it is stated in this bill a permittivity membrane low. Low the permittivity membrane, has satisfactory mechanical quality and adhesiveness, and desirable permittivity.