ACTUATOR DRIVE DEVICE, TRANSLATIONAL PARALLEL MECHANISM USING THE SAME, INTERFEROMETER AND SPECTROMETER

摘要

PROBLEM TO BE SOLVED: To provide a drive device which drives an actuator provided with a movable part to be driven and a drive part to drive the movable part by a PLL circuit to perform a resonance drive, which allows a definite phase entrainment (phase lock-in) in a short time and further suppresses increase in circuit scale and cost.;SOLUTION: The actuator drive device comprises a loop filter part 14a including: an integration circuit 21 functioning as an LPF smoothing a phase comparison signal Vpd of a phase comparator 13 and supplying the smoothed signal to a VCO 11 as a control voltage Vc; a reference voltage source 22; and a short-cut switch 23 functioning as reset means. Consequently, since the control voltage Vc shifts from the reference voltage Vref to a voltage near a target voltage smoothly with an integral control action, overshoot or ringing does not occur and the definite phase entrainment (phase lock-in) is allowed to be performed in a short time. Further, it is unnecessary to provide any special component for sweeping the control signal outside the PLL loop.;COPYRIGHT: (C)2012,JPO&INPIT