Micro switching element and micro switching element production mannered

摘要

PROBLEM TO BE SOLVED: To provide a microswitching element suitable for reducing a driving voltage.;SOLUTION: This microswitching element X1 is equipped with a base substrate S1, a stationary part 11, a movable part 12 extending along the base substrate S1 while having a stationary end 12a fixed to the stationary part 11, a movable contact electrode 13 provided on the movable part 12, a pair of stationary contact electrodes 14 each bonded to the stationary part 11 while each having potions facing the movable contact electrode 13, a movable driving electrode 15 provided between the movable contact electrode 13 and the stationary end 12a on the movable part 12, and a stationary driving electrode 16 bonded to the stationary part 11 while having an elevated part 16A including a portion facing the movable driving electrode 15. The elevated part 16A has a stair-stepped shape 16a consisting of a plurality of steps 16a', and the further each step 16a' of the stair-stepped shape 16a is from the movable contact electrode 13, the closer the step 16a' is to the base substrate S1.;COPYRIGHT: (C)2008,JPO&INPIT