Performance of the acoustic resonator utilizing an edge structure of the alternating arrangement

摘要

PROBLEM TO BE SOLVED: To provide an acoustic resonator of high quality coefficient suppressing dispersion of resonance energy to the outside of the resonator.;SOLUTION: In an acoustic resonator that includes a substrate, a first electrode adjacent the substrate and having an outer perimeter, a layer of piezoelectric material adjacent the first electrode, and a second electrode adjacent the layer of piezoelectric material and having an outer perimeter, around either the first electrode or the second electrode, a frame region or frame is formed by alternating regions of different acoustic impedance. For example, a protruding or rushing-in portion is formed in an electrode by lifting-off.;COPYRIGHT: (C)2007,JPO&INPIT