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Acoustic resonator performance enhancement using alternating frame structure
Acoustic resonator performance enhancement using alternating frame structure
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机译:使用交替框架结构提高声学谐振器性能
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摘要
Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The alternating frame region is on one of the first and second electrodes.
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