In order to restrict the electric charge effect, being power-supply unit ALT for the ion implantation

摘要

As for this invention this electric power unit consists of the condenser CDS which is while parallel branching which is connected in the same way with baseplate conveyance tray PPS and with ground E electric generator SOU and the aforementioned baseplate conveyance tray PPS and the ground E which are installed in regard to the electric power unit ALT for the ion implantation machine. Condenser CDS has the electric capacity which is smaller than 5nF. In addition as for this invention, the ion implantation machine which builds in the electric power unit is offered.