Surface wave excited plasma generator and surface wave excited plasma central processing unit

摘要

Topic Generate the surface wave excited plasma efficiently.Solutions Surface wave excited plasma generator 10 annular wave guide has with 2 and dielectric tube 3. Annular wave guide 2 is introduced and, the inlet 2a which introduces microwave M and, the inside of pipe possesses with the terminal board 2b which the microwave M which is spread reflects and the sabot 2c where slot antenna 2d is formed at specified interval. When guide wave length of microwave M is designated as g, position c, passing d and e from position b on sabot 2c, length to position f, in other words, it configurates around length D1 of annular wave guide 2 to 2g, position b, c, configurates d, e and f, at the interval of g/2. Because position it lays out slot antenna 2d, in 2 places of c and position e, interval of these two slot antennas 2d becomes equal in guide wave length g.