Character Diagnosis for Surface-Wave Plasmas Excited by Surface Plasmon Polaritons

摘要

The plasma parameters of planar-type surface-wave plasmas （SWPs） are diagnosed based on the resonant excitation of surface plasmon polaritons （SPPs）. The plasma parameter distributions are obtained by changing the discharge conditions of gas pressure and incident power. The measured experimental results show that the plasma near the heating layer is excited by surface waves of SPPs while the plasma located downstream originates from diffusion Moreover, the influence of high-frequency oscillations plays a significant role in producing the proposed SWPs with bi-Maxwellian electron energy distributions.