Frictional force amendment manner of stylus type difference in level meter for surface form measurement

摘要

P To provide a frictional force correction method for a stylus type step gage for measuring a surface shape capable of compensating frictional force generated by a frictional situation in a fulcrum portion and a change in a contact condition or the like to generate stylus pressure. PSOLUTION: In this frictional force correction method for the stylus type step gage attached with a probe in one end of a support body attached swingably to a fulcrum, attached adjacently to the one end with a magnetic substance core for a displacement sensor for detecting a vertical-directional displacement of the probe, attached with a magnetic substance core for the stylus pressure generator for applying the stylus pressure to the probe in the other end of the support body, and for measuring the surface shape of a sample captured by the probe, by the displacement sensor due to rotational motion around the fulcrum of the support body and the stylus pressure generator is operated to measure an acceleration when the probe is lowered, so as to find force in the lowering, an acceleration when the probe is elevated reboundingly by a lower stopper or the like after lowered is measured to find force in the elevation, and a current flowing in the stylus pressure generator is controlled to apply a half of the sum of the force in the lowering and the force in the elevation onto the probe and when measuring actually the surface shape. PCOPYRIGHT: (C)2007 and JPO& INPIT