Stylus type difference in level meter and its stylus pressure amendment manner for surface form measurement

摘要

P To provide a probe type step profiler for measuring surface shape and a method for correcting the needle pressure capable of generating needle pressure by correcting the minute fluctuation of force with a simple way. PSOLUTION: The needle pressure correction method of the probe type step profiler is as follows: the actual force is obtained by measuring the lowering acceleration and the difference between the obtained force and set force for measuring the surface shape is reflected to the constant c in the equation y=axSP2/SP+bx+c (where, a and b and c are constants) representing the relationship between the force y and the current x flowing through the coil of the needle pressure generation device, thereby a new relational equation is obtained, from the newly obtained equation and the current to be made to flow through the coil of the needle pressure generation device is established. PCOPYRIGHT: (C)2007 and JPO& INPIT