In the air drag amendment mannered null fulcrum of the stylus type difference in level meter for surface

摘要

PROBLEM TO BE SOLVED: To provide an air resistance correction method of a stylus type step profiler for surface shape measurement capable of accurately computing a force generated at the time of shape measurement by the stylus type step profiler in a short time.;SOLUTION: A stylus is mounted to one end of a support rockably mounted to a fulcrum. A magnetic core of a displacement sensor for detecting displacements of the stylus in vertical directions is mounted adjacently to the one end. A magnetic core of a needle pressure generating device for adding needle pressure to the stylus is mounted to the other end. The displacement sensor measures the surface shape of a sample captured by the stylus on the basis of the rotational motion of the support around the fulcrum in the air resistance correction method of the stylus type step profiler. In the method, the needle pressure generating device is operated to lower the stylus from an upper end to measure temporal changes of displacements of the stylus when the stylus springs up once at its lower end. On the basis of measured temporal changes of the displacements of the stylus, the relation of the speed of the stylus and force is determined to determine the force when the speed of the stylus is approximately zero. A deviation from a set value is corrected on the basis of the determine force, and the correct relation between a current to be made to flow through the needle pressure generating device and a force to be exerted on the stylus is determined. A coil current corresponding to a force which one desired to set is computed.;COPYRIGHT: (C)2009,JPO&INPIT