High purity crystal silicon, high purity silicon tetrachloride and those production manners

摘要

This invention can be satisfied also the portion of quality request not only the raw materials of the silicon for the solar battery, as a silicon for the up-to-date semiconductor, cheaper high purity crystal silicon and its production manner, and the high purity silicon tetrachloride which is used for the production of high purity crystal silicon and that its production manner is offered are designated as topic. As for the high purity crystal silicon of this invention, boron content is below 0.015ppmw, at the same time spelter content is 50ppbw - 1000ppbw. Production manner of the high purity crystal silicon of this invention, supplying silicon tetrachloride gases and the spelter gas inside the vertical die reactor, generates crude crystal silicon to the Tip of silicon tetrachloride gas supply nozzles by reacting with 800 - the 1200 , grows crude crystal silicon from the Tip of silicon tetrachloride gas supply nozzles facing toward the lower part, discharges the crude crystal silicon which it grew outside the reactor, features that the Acid it treats the crude crystal silicon which is discharged.