Temperature sensor for the ring oscillator, temperature sensor circuit and semiconductor device including the same

摘要

As for the ring oscillograph (1), each includes the invertor, the odd number which is connected in series consists of the unit circuit (2). The unit circuit (2), for example, it consists of with invertor and MOSFETQ13. As for MOSFETQ13, being the temperature sensor, it is FET which uses the leak electric current between the drain - source in a state where it is turned off stationarily.