Motion error measurement reference body and motion error measuring device

摘要

PROBLEM TO BE SOLVED: To provide a motion error measuring reference and a motion error measuring device capable of performing highly accurate measurement by extracting a pitching error or a rolling error.;SOLUTION: In this motion error measuring reference which is, for example, usable for a measuring device for determining a motion error of a stage supported movably in a prescribed direction to a base, a difference between an actual object surface and a mathematical ideal surface to be constituted by a generating line is calibrated with respect to a fine displacement to the outside of the surface and a fine angle displacement in the surface normal direction at a prescribed point whose distance from the origin is known along the generating line, and a calibration value is stored and imparted as numerical data servable for operation.;COPYRIGHT: (C)2008,JPO&INPIT