This paper gives an error analysis of radial motion measurement of ultra-precision spindle including nonlinearity error of capacitive displacement probes, misalignment error of probes, eccentric error of artifact ball and error induced by different error separating methods. Firstly, nonlinearity of a capacitive displacement probe targeting a spherical surface is investigated through experiment and the phenomena of fake displacement induced by lateral offset of the probe relative to an artifact ball?are?discussed. It is shown that the error motion in radial and axial direction and eccentric rotation of artifact ball will both induce lateral offset which causes a fake output of probes. Moreover, measurement error induced by angular positioning error for three famous error separating methods is detailed.
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