Gas-liquid mixing cleaning equipment and gas-liquid mixing cleaning method

摘要

PROBLEM TO BE SOLVED: To efficiently clean an electronic part or the like to be cleaned in a short time without deteriorating its performance of a product even when the electronic part is superfine and is apt to be affected easily by minute external force or the like. SOLUTION: The liquid introduced from a liquid inlet 2 is supplied to a flow straightening plate 4 in a nozzle box 1 through a liquid supplying pipeline 5 and the gas introduced from a gas inlet 3 is also supplied to the plate 4 so that the liquid and the gas are mixed with each other to form a gas-liquid mixed fluid. The gas-liquid mixed fluid is sprayed uniformly from the whole surface of the plate 4 by means of the capillary phenomenon and moderately discharged uniformly to the part to be cleaned having a certain area through the plate 4 without pressurizing the part to be cleaned.