Evaluation method of the transparent conductive film and transparent conductive film evaluation device

摘要

PROBLEM TO BE SOLVED: To provide an evaluation device of a transparent conductive film capable of accurately inspecting the electric characteristics of a transparent conductive film on-line in a short time, and an evaluation method of the transparent conductive film.;SOLUTION: The evaluation device of the transparent conductive film is equipped with an irradiation part 3 for irradiating the transparent conductive film formed on a substrate 11 with light, which has a wavelength corresponding to characteristics to be measured, being irradiation light, a detection part 2 for detecting the reflected light from the transparent conductive film irradiated with the irradiation light and a control part 7 for evaluating the characteristics of the transparent conductive film on the basis of the reflectivity calculated from the irradiation light and the reflected light. The wavelength of the irradiation light is 0.7 or above in the correlation of the reflectivity with the characteristics. In the measurement of the sheet resistance of the transparent conductive film, light with a wavelength of 2.0-3.0 μm may be used. In the measurement of the resistivity of the transparent conductive film, light with a wavelength of 1.5-1.8 μm may be used.;COPYRIGHT: (C)2007,JPO&INPIT