首页> 外国专利> Optical Surface Shape Determination by Mapping a Lenslet Array Spot Pattern to a Spatial Frequency Space

Optical Surface Shape Determination by Mapping a Lenslet Array Spot Pattern to a Spatial Frequency Space

机译:通过将小透镜阵列光斑图案映射到空间频率空间来确定光学表面形状

摘要

Devices systems, and methods can characterize an optical surface of an object. A wavefront sensor system focuses light energy propagating from the object to form a pattern on a detector. The system maps the pattern to an array with a transform function such as a Fourier transform. The values of array correspond to characteristic locations and signals in a transform space, for example an intensity of spatial frequency signals in frequency space. The characteristic location and intensity of these signals in transform space are used to measure the optical surface. For example, a characteristic frequency of a spatial frequency intensity peak in Fourier transform space can be used to estimate the location of spots on the detector. Alternatively, the characteristics can be used to the measure sphere, cylinder and axis of a wavefront, wavefront elevation maps and point spread functions, often without locating positions of individual spots on the detector.
机译:装置系统和方法可以表征物体的光学表面。波前传感器系统聚焦从物体传播的光能,以在检测器上形成图案。系统将图案映射到具有诸如傅立叶变换的变换功能的阵列。阵列的值对应于变换空间中的特征位置和信号,例如,频率空间中的空间频率信号的强度。这些信号在变换空间中的特征性位置和强度用于测量光学表面。例如,傅立叶变换空间中的空间频率强度峰值的特征频率可以用于估计检测器上的斑点的位置。或者,可以将特征用于测量波前的球体,圆柱和轴,波前高程图和点扩展函数,而通常无需在检测器上定位各个点的位置。

著录项

  • 公开/公告号US2012267510A1

    专利类型

  • 公开/公告日2012-10-25

    原文格式PDF

  • 申请/专利权人 ERIK GROSS;CHARLES CAMPBELL;

    申请/专利号US201213372138

  • 发明设计人 ERIK GROSS;CHARLES CAMPBELL;

    申请日2012-02-13

  • 分类号G01J1/20;

  • 国家 US

  • 入库时间 2022-08-21 17:34:42

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