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Sacrificial layers made from aerogel for microelectromechanical systems (MEMS) device fabrication processes
Sacrificial layers made from aerogel for microelectromechanical systems (MEMS) device fabrication processes
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机译:由气凝胶制成的牺牲层,用于微机电系统(MEMS)器件制造工艺
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摘要
Systems and methods for processing sacrificial layers in MEMS device fabrication are provided. In one embodiment, a method comprises: applying a patterned layer of Aerogel material onto a substrate to form an Aerogel sacrificial layer; applying at least one non-sacrificial silicon layer over the Aerogel sacrificial layer, wherein the non-sacrificial silicon layer is coupled to the substrate through one or more gaps provided in the patterned layer of Aerogel material; and removing the Aerogel sacrificial layer by exposing the Aerogel sacrificial layer to a removal liquid.
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