首页> 外国专利> CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE, METHOD OF FORMING THE CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE

CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE, METHOD OF FORMING THE CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE

机译:导电层埋入型基体,导电层埋入型基体的形成方法以及利用导电层埋入型基体制造半导体装置的方法

摘要

A conductive layer buried-type substrate is disclosed. The substrate includes a silicon oxidation layer bonded to a supporting substrate, an adhesion promotion layer that is formed on the silicon oxidation layer and improves an adhesion between the silicon oxidation layer and a conductive layer, wherein the conductive layer is formed on the adhesion promotion layer and comprises a metal layer, and a single crystal semiconductor layer formed on the conductive layer.
机译:公开了一种导电层掩埋型基板。基板包括:粘结至支撑基板的硅氧化层;形成在硅氧化层上并改善硅氧化层与导电层之间的粘附力的粘合促进层,其中,导电层形成在粘合促进层上并包括金属层和形成在导电层上的单晶半导体层。

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