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CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE, METHOD OF FORMING THE CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE
CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE, METHOD OF FORMING THE CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE CONDUCTIVE LAYER BURIED-TYPE SUBSTRATE
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机译:导电层埋入型基体,导电层埋入型基体的形成方法以及利用导电层埋入型基体制造半导体装置的方法
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摘要
A conductive layer buried-type substrate is disclosed. The substrate includes a silicon oxidation layer bonded to a supporting substrate, an adhesion promotion layer that is formed on the silicon oxidation layer and improves an adhesion between the silicon oxidation layer and a conductive layer, wherein the conductive layer is formed on the adhesion promotion layer and comprises a metal layer, and a single crystal semiconductor layer formed on the conductive layer.
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