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SELECTIVELY DEPOSITED THIN FILM DEVICES AND METHODS FOR FORMING SELECTIVELY DEPOSITED THIN FILMS
SELECTIVELY DEPOSITED THIN FILM DEVICES AND METHODS FOR FORMING SELECTIVELY DEPOSITED THIN FILMS
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机译:选择性沉积的薄膜装置和形成选择性沉积的薄膜的方法
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摘要
A method for selectively depositing a thin film structure on a substrate. The method includes providing a process gas to a surface of the substrate and directing concentrated electromagnetic energy from a source of energy to at least a portion of the surface. The process gas is decomposed onto the substrate to form a selectively deposited thin film structure. A thin film device and apparatus for forming a selectively deposited thin film structure are also disclosed.
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