DISPLACEMENT CALCULATION METHOD, DRAWING DATA CORRECTION METHOD, SUBSTRATE MANUFACTURING METHOD, AND DRAWING APPARATUS

摘要

Correction values (ΔX1 to ΔX4) at the X position (X=xe) of a target point (E (xe, ye)) are calculated by calculating the amounts of shift (ΔX) in the positions of alignment marks (M11 to M14, M21 to M24, M31 to M34, M41 to M44) in the X direction and plotting first spline curves (SL1) using the amounts of shift. Then, a first sub-spline curve (SL1S) is plotted using the correction values (ΔX1 to ΔX4) in order to calculate a correction value (ΔXe) at the Y position (Y=ye) of the target point (E (xe, ye)), and the calculated correction value is taken as the correction amount in the X direction. The correction amount in the Y direction is also calculated in the same manner.