DISPLACEMENT CALCULATION METHOD, CORRECTION METHOD OF DRAWING DATA, DRAWING METHOD, AND DRAWING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a displacement calculation method, along with a drawing device, capable of accurately calculating displacement by understanding the tendency of distortion over a wide area of a substrate even if a distortion which is not local occurs on the substrate.;SOLUTION: A deviation amount ΔX in X direction is calculated at each position of alignment marks M11-M14, M21-M24, M31-M34, and M41-M44. Based on the deviation amount, a first spline curve SL1 is drawn, to calculate correction values ΔX1-ΔX4 at X position (X=xe) of an evaluation point E(xe, ye). A first sub-spline curve SL1S is drawn based on the ΔX1-ΔX4, to calculate a correction value ΔXe at Y position (X=ye) of the evaluation point E(xe, ye), which is used as a correction amount in X direction. The correction amount in Y direction can be calculated likewise.;COPYRIGHT: (C)2012,JPO&INPIT