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Sensor for quantitative measurement of electromechanical properties and microstructure of nano-materials and method for making the same

机译:用于定量测量纳米材料的机电性能和微观结构的传感器及其制造方法

摘要

A sensor for quantitative testing electromechanical properties and microstructure of nano-materials and a manufacturing method for the sensor are provided. The sensor comprises a suspended structure, pressure-sensitive resistor cantilevers, support beams, bimetallic strip and other components. When the bimetallic strip produces bending deformation, one of the pressure-sensitive resistor cantilevers is actuated and then stretches the low-dimensional nano-materials which drive the other pressure-sensitive resistor cantilever to bend. Through signal changes are outputted by the Wheatstone bridge, the variable stresses of low-dimensional nano-materials are obtained. Meanwhile, the variable strains of low-dimensional nano-materials are obtained by the horizontal displacements between two cantilevers, so the stress-strain curves of low-dimensional nano-materials are worked out. When the low-dimensional nano-materials are measured in the power state, the voltage-current curves are also obtained. In addition, by the help of high resolution imaging system in the transmission electron microscopy, the mechanical-electrical-microstructure relationship of the nano-materials can be recorded in situ and in atomic lattice resolution.
机译:提供了一种用于定量测试纳米材料的机电性能和微观结构的传感器以及该传感器的制造方法。该传感器包括悬挂结构,压敏电阻悬臂,支撑梁,双金属条和其他组件。当双金属条产生弯曲变形时,压敏电阻器悬臂之一被致动,然后拉伸低维纳米材料,其驱动另一压敏电阻器悬臂弯曲。通过惠斯通电桥输出信号变化,获得了低维纳米材料的可变应力。同时,通过两个悬臂之间的水平位移来获得低维纳米材料的可变应变,从而绘制出低维纳米材料的应力-应变曲线。当在功率状态下测量低维纳米材料时,还获得了电压-电流曲线。另外,借助于透射电子显微镜中的高分辨率成像系统,可以原位和原子晶格分辨率记录纳米材料的机械-电-微结构关系。

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