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Spin head, chuck pin used in the spin head, and method for treating a substrate with the spin head
Spin head, chuck pin used in the spin head, and method for treating a substrate with the spin head
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机译:旋转头,旋转头中使用的卡盘销以及用旋转头处理基板的方法
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摘要
Provided is a spin head for supporting a substrate. The spin head includes a rotatable body, and chuck pins protruding upward from the body and configured to support an edge of a substrate placed at the body when the body is rotated. Each of the chuck pins includes a vertical rod vertically disposed at the body, and a support rod extending from a side of the vertical rod and configured to make contact with the edge of the substrate placed at the body when the body is rotated. When the substrate is rotated, the vertical rod is spaced apart from the edge of the substrate. The contact portion includes a streamlined side surface. The support rod includes a contact portion. The contact portion tapers toward the end of the support rod when viewed from the top of the support rod.
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