SPIN HEAD AND METHOD FOR CHUCKING/UNCHUKING SUBSTRATE USING THE SPIN HEAD, AND APPARATUS FOR TREATING SUBSTRATE WITH THE SPIN HEAD

摘要

A spin head and a method for chucking/dechucking a substrate using the same, and an apparatus for treating a substrate with the same are provided to improve process efficiency by preventing a residual processing solution on a substrate. A body(110) has a rotating function. A chucking/dechucking unit includes a plurality of chucking pins which are arranged in a shape of ring around an upper surface of the body. The chucking/dechucking unit chucks or dechucks an edge part of a substrate(W). A driving unit rotates the chucking pins at a constant angle in order to change selectively contact parts between the chucking pins and the substrate. The driving unit includes an up/down movable drivers(140) and a motion conversion part(150,160) for converting the vertical motion of the chucking pins to the rotatory motion.