PPatent Issued for Spin Head and Method of Chucking Substrate Using the Same

摘要

2013 MAR 27 (VerticalNews) -- By a News Reporter-Staff News Editor at Journal of Engineering -- A patent by the inventor Lee, Taek Youb (Cheonan-si, KR), filed on November 13, 2009, was cleared and issued on March 12, 2013, according to news reporting originating from Alexandria, Virginia, by VerticalNews correspondents.