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Active matrix substrate, display device, television receiver, manufacturing method of active matrix substrate, forming method of gate insulating film

机译:有源矩阵基板,显示装置,电视接收机,有源矩阵基板的制造方法,栅极绝缘膜的形成方法

摘要

In an active matrix substrate of the present invention, a gate insulating film for covering a gate electrode of each transistor has a thin portion, having a reduced film thickness, which is provided on a part overlapped on the gate electrode, and the thin portion is formed by using the gate electrode, on which the thin portion is overlapped, as a mask, and each transistor has a first drain electrode section and a second drain electrode section which are respectively provided on both sides of a source electrode, and the thin portion has two edges opposite to each other, and the first drain electrode section is overlapped on the one edge, and the second drain electrode section is overlapped on the other edge. This makes it possible to provide an active matrix substrate which realizes high display quality while suppressing unevenness of parasitic capacitances (particularly, Cgd) of TFTs in the active matrix substrate whose each TFT has a thin portion in its gate insulating film.
机译:在本发明的有源矩阵衬底中,用于覆盖每个晶体管的栅电极的栅绝缘膜具有薄的部分,该薄部分具有减小的膜厚度,该薄部分设置在与栅电极重叠的部分上,并且该薄部分是通过使用其上覆盖有薄部分的栅电极作为掩模而形成,并且每个晶体管具有分别设置在源电极两侧的第一漏电极部分和第二漏电极部分,以及薄部分漏极具有彼此相对的两个边缘,并且第一漏电极部分在一个边缘上重叠,第二漏电极部分在另一边缘上重叠。这使得可以提供一种有源矩阵基板,该有源矩阵基板在抑制其栅极绝缘膜中的每个TFT具有薄部分的有源矩阵基板中的TFT的寄生电容(特别是Cgd)的不均匀的同时,实现了高显示质量。

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