Integrated nanowires/microelectrode array for biosensing

摘要

The present invention provides a method for the controlled synthesis of nanostructures on the edges of electrodes and an apparatus capable of optical and electrochemical sensing. In accordance with the present invention, a method of fabricating nanowires is provided. In one embodiment, the method includes providing a substrate, creating a dielectric thereon, depositing a metal catalyst on the dielectric, patterning the metal catalyst, selectively etching dielectric, creating an electric field originating in metal catalyst, and applying a heat treatment. In another embodiment, the method includes providing a substrate, depositing a dielectric thereon, printing a metal catalyst on the dielectric and plastic substrate, printing silicide along the edges of metal catalyst, creating an electric field originating in metal catalyst; and applying chemical vapor deposition. The apparatus of the present invention comprise an electrode with nanowires grown thereon, wherein the nanowires' placement and direction of growth is controlled.