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Method for measuring optical characteristics of diffraction optical element and apparatus for measuring optical characteristics of diffraction optical element
Method for measuring optical characteristics of diffraction optical element and apparatus for measuring optical characteristics of diffraction optical element
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机译:测量衍射光学元件的光学特性的方法和测量衍射光学元件的光学特性的设备
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摘要
A measurement method and an evaluating apparatus are provided which are capable of easily and accurately evaluating the light amount of a spot beam, the diffraction efficiency, and the intensity distribution in the optical axis direction by detecting even a weak diffracted beam in an arbitrary wavelength range converged by a diffraction optical element as an imaging lens.
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