首页> 外国专利> SEPARATION OF DOPING DENSITY AND MINORITY CARRIER LIFETIME IN PHOTOLUMINESCENCE MEASUREMENTS ON SEMICONDUCTOR MATERIALS

SEPARATION OF DOPING DENSITY AND MINORITY CARRIER LIFETIME IN PHOTOLUMINESCENCE MEASUREMENTS ON SEMICONDUCTOR MATERIALS

机译:半导体材料光致发光测量中的掺杂浓度和少数载流子寿命的分离

摘要

Methods are presented for separating the effects of background doping density and effective minority carrier lifetime on photoluminescence (PL) generated from semiconductor materials. In one embodiment the background doping density is measured by another technique, enabling PL measurements to be analysed in terms of effective minority carrier lifetime. In another embodiment the effective lifetime is measured by another technique, enabling PL measurements to be analysed in terms of background doping density. In yet another embodiment, the effect of background doping density is removed by calculating intensity ratios of two PL measurements obtained in different spectral regions, or generated by different excitation wavelengths. The methods are particularly useful for bulk samples such as bricks or ingots of silicon, where information can be obtained over a much wider range of bulk lifetime values than is possible with thin, surface-limited samples such as silicon wafers. The methods may find application in solar cell manufacturing for improving the manufacture of silicon ingots and bricks, or for providing a cutting guide for wafering.
机译:提出了分离背景掺杂密度和有效少数载流子寿命对半导体材料产生的光致发光(PL)的影响的方法。在一个实施例中,通过另一种技术来测量背景掺杂密度,从而能够根据有效少数载流子寿命来分析PL测量。在另一个实施例中,有效寿命是通过另一种技术来测量的,从而使得能够根据背景掺杂密度来分析PL测量。在又一个实施例中,通过计算在不同光谱区域中获得或由不同激发波长产生的两个PL测量的强度比来消除背景掺杂密度的影响。该方法对于块状样品(例如砖或硅锭)特别有用,与在薄而受表面限制的样品(例如硅片)中可以获得的信息相比,该方法在更大的块状寿命值范围内可以获得信息。该方法可以发现在太阳能电池制造中的应用,以改善硅锭和砖的制造,或提供用于切割的切割引导。

著录项

  • 公开/公告号SG177341A1

    专利类型

  • 公开/公告日2012-02-28

    原文格式PDF

  • 申请/专利权人 BT IMAGING PTY LTD;

    申请/专利号SG20110095684

  • 发明设计人 TRUPKE THORSTEN;

    申请日2010-07-19

  • 分类号G01N21/64;H01L35/18;G01N21/66;G01N21/95;H01L21/66;

  • 国家 SG

  • 入库时间 2022-08-21 17:22:26

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