Resonant performance feedback method for mems electrostatic actuators.

摘要

Method resonant performance feedback for electrostatic actuators MEMS. # The Invention is to connect the electrostatic actuator (1) to an electronic circuit functioning as a sensor or estimator of the distance or capacity between armor actuator (2), obtain the speed that the armatures move through a diverter said distance or capacity (3) and applying an electrical signal to the electrostatic actuator (4) to generate an electric force in the same direction as the velocity. With this, an electrostatic actuator is initially in the rest position oscillate with increasing amplitude until the collapse voltages without requiring high performance.