Method of material analysis by means of a focused electron beam using characteristic X-rays and back-scattered electrons and the equipment to perform it

摘要

#$%^&*AU2012201146A120121011.pdf#####Abstract Method of material analysis by means of focused electron beam using characteristic X-rays and back-scattered electrons and equipment to perform it A material analysis method by a focused electron beam and an equipment for performing such an analysis where an electron map B is created describing the intensity of emitted back-scattered electrons at various points on a sample, and a spectral map S is created describing the intensity of emitted X-rays at points on the sample depending on the radiation energy. For selected chemical elements, X-ray maps Mi are created representing the intensity of X-rays characteristic for such elements. The X-ray maps Mi and the electron map B are converted into differential X-ray maps Di, which are subsequently merged into a final differential X-ray map D. The final differential X-ray map D is then used to search particles. Subsequently, a cumulative X-ray spectrum Xj is calculated for each particle, whereas points on the sample located on the edge of the particle have lower weight than points inside the particle. The cumulative X-ray spectrum Xj is then processed to get peak intensities of chemical elements and subsequently the classification of particles based on the peak intensities and the intensity of back-scattered electron is performed.1/8 --------------------------------------------------------------------------------101 131 X X IX X I 8 10 *I 3 13 Fig.I