Elemental Analysis of Materials by Energy-Dispersive Spectrometry of X-Rays Produced by a Focusing Electron Gun.

摘要

The construction and operation of a system for elemental analysis of materials by energy-dispersive x-ray analysis are described. Fluorescent x rays from samples are excited either directly by electrons from the gun or by secondary x rays produced by using the electrons to excite interchangeable thin targets. With electron energies up to 40keV and beam currents as high as 300 microamps elemental concentrations as low as 0.1micrograms and less than 10ppm have been detected with short exposures. The sensitivity of this system is compared to systems which use radionuclides and protons to excite x rays. (Modified author abstract)