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2-axis driving electromagnetic scanner

机译:2轴驱动电磁扫描仪

摘要

A 2-axis driving electromagnetic scanner (100), having a structure in which a mirror (131) is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit (120) which is capable of rotating around a first axis; an inner driving unit (133) which is suspended from the outer driving unit (120) so as to rotate around a second axis perpendicular to the first axis; and a stage (131) which is located on an upper surface of the inner driving unit (133) so as to rotate together with the inner driving unit (133). In the electromagnetic scanner (100), the stage is connected to the inner driving unit (133) by a link unit (136) protruding from a center of a lower surface of the stage (131).
机译:提供一种具有其中反射镜(131)与驱动单元分离并且被直接驱动的结构的2轴驱动电磁扫描器(100)。该电磁扫描仪包括:外部驱动单元(120),其能够绕第一轴旋转;以及内驱动单元(133)悬挂在外驱动单元(120)上,以绕垂直于第一轴线的第二轴线旋转。台(131)位于内部驱动单元(133)的上表面,以与内部驱动单元(133)一起旋转。在电磁扫描仪(100)中,平台通过从平台(131)的下表面的中心突出的连接单元(136)连接到内部驱动单元(133)。

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