Process for forming an electromechanical component for a micro- or nano-system having a rod which forms the rotation axis of the component, the rod being covered with graphene

摘要

The method involves forming a material of a bar from a layer, where the material rests on a support. Two graphene sheets separated from each other and mobile with respect to each other is formed around the bar. The material is silicon carbide, copper, nickel, iridium, platinum, ruthenium, palladium or amorphous carbon. The bar is fabricated during forming of the material in order to form a non-zero angle with a main plane of the support, where the bar is connected to an area of an anchoring block belonging to the layer. An independent claim is also included for an electro-mechanical system comprising a mobile unit.